Invention Grant
- Patent Title: Positive-working photoresist composition for thick film formation
- Patent Title (中): 用于厚膜形成的正性光致抗蚀剂组合物
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Application No.: US11792752Application Date: 2006-03-22
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Publication No.: US09436084B2Publication Date: 2016-09-06
- Inventor: Koichi Misumi , Toshiki Okui
- Applicant: Koichi Misumi , Toshiki Okui
- Applicant Address: JP Kanagawa
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kanagawa
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2005-084827 20050323
- International Application: PCT/JP2006/306389 WO 20060322
- International Announcement: WO2006/101250 WO 20060928
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; H01L21/027 ; C08F220/18 ; C07D251/02

Abstract:
The invention provides a chemical-amplification positive-working photoresist composition suitable for forming a resist film of a relatively large thickness on a substrate in addition to other advantages. The inventive composition contains (A) a photoacid-generating agent, (B) an alkali-insoluble resin capable of being imparted with increased alkali-solubility by interaction with an acid, (C) an alkali-soluble resin and (D) an organic solvent, wherein the component (C) is (C1) a polyhydroxystyrene or a copolymer having at least 80% by mass of the hydroxystyrene units in an amount not exceeding 15 parts by mass relative to 100 parts by mass of the total amount of the components (B) and (C).
Public/Granted literature
- US20080026321A1 Positive-working photoresist composition for thick film formation Public/Granted day:2008-01-31
Information query
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