Invention Grant
- Patent Title: Gimbaled scanning mirror array
- Patent Title (中): 万向扫描镜阵列
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Application No.: US13798251Application Date: 2013-03-13
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Publication No.: US09435638B2Publication Date: 2016-09-06
- Inventor: Naftali Chayat , Yuval Gerson
- Applicant: PRIMESENSE LTD.
- Applicant Address: US CA Cupertino
- Assignee: APPLE INC.
- Current Assignee: APPLE INC.
- Current Assignee Address: US CA Cupertino
- Agency: D.Kligler IP Services Ltd.
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B26/12 ; G01B11/24 ; G01S17/89 ; G01S17/10 ; G01S17/42 ; G01S7/481 ; H01L21/50

Abstract:
An optical scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.
Public/Granted literature
- US20140153001A1 GIMBALED SCANNING MIRROR ARRAY Public/Granted day:2014-06-05
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