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US09435638B2 Gimbaled scanning mirror array 有权
万向扫描镜阵列

Gimbaled scanning mirror array
Abstract:
An optical scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.
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