Invention Grant
US09409793B2 Spin coatable metallic hard mask compositions and processes thereof
有权
旋涂可涂层金属硬掩模组合物及其工艺
- Patent Title: Spin coatable metallic hard mask compositions and processes thereof
- Patent Title (中): 旋涂可涂层金属硬掩模组合物及其工艺
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Application No.: US14154929Application Date: 2014-01-14
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Publication No.: US09409793B2Publication Date: 2016-08-09
- Inventor: Venkata Gopal Reddy Chada , Huirong Yao , Salem Mullen , Elizabeth Wolfer , Alberto D. Dioses , JoonYeon Cho , Munirathna Padmanaban
- Applicant: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Applicant Address: LU Luxembourg
- Assignee: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Current Assignee: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Current Assignee Address: LU Luxembourg
- Agent Mitchell Brustein
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C01G31/00 ; C01G39/00 ; C01G41/00 ; H01L21/033
Abstract:
The present invention relates to a novel spin coatable composition comprising (a) metallosilicic acid; (b) at least one compound comprising two or more 4-hydroxyphenyl groups; and, c) a solvent. The component b) can be a 4-hydroxyphenyl compound of structure (I) wherein W is a linking group chosen from the group consisting of an organic linking moiety, a heteroatom containing linking moiety and a direct valence bond, m is a positive integer of 1 and n is a positive integer equal to 1 or and Ri, Rii, Riii and Riv are independently chosen substituents from a group consisting of hydrogen, (C1-C6) alkyl, (C1-C6) alkoxy, (C6-C20) aryl, halides (such as Cl, I, F), hydroxyl, alkylcarbonyl (alkyl-C(═O)—), alkylcarbonyloxy (alkyl-C(═O)—O—), alkyloxycarbonyl (alkyl-O—C(═O)—), alkyloxycarbonyloxy (alkyl-O—C(═O)—O—) and mixtures of these; and a solvent. The present invention further relates to processes using the novel compositions.
Public/Granted literature
- US20150200090A1 SPIN COATABLE METALLIC HARD MASK COMPOSITIONS AND PROCESSES THEREOF Public/Granted day:2015-07-16
Information query
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