Invention Grant
US09409782B2 Method of fabricating silicon carbide powder 有权
制造碳化硅粉末的方法

Method of fabricating silicon carbide powder
Abstract:
A method of fabricating silicon carbide powder according to the embodiment comprises the steps of preparing a mixture by mixing a silicon source comprising silicon with a carbon source comprising a solid carbon source or an organic carbon compound; reacting the mixture; and controlling the reacting of the mixture, wherein the step of controlling the reacting comprises a step of supplying process gas or reaction product gas.
Public/Granted literature
Information query
Patent Agency Ranking
0/0