Invention Grant
- Patent Title: Laser processing method
- Patent Title (中): 激光加工方法
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Application No.: US13701031Application Date: 2011-05-20
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Publication No.: US09409256B2Publication Date: 2016-08-09
- Inventor: Ryuji Sugiura
- Applicant: Ryuji Sugiura
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2010-127045 20100602
- International Application: PCT/JP2011/061674 WO 20110520
- International Announcement: WO2011/152230 WO 20111208
- Main IPC: B23K26/38
- IPC: B23K26/38 ; B23K26/00 ; B23K26/40

Abstract:
To provide a laser processing method which is capable of enhancing the dividing performance according to a required quality. By irradiating an object to be processed with a laser light L having a pulse waveform in which its half width and its bottom width are equal to one another, a plurality of modified spots are formed along a line to cut inside the object, and a modified region is formed with the plurality of modified spots. Here, a laser light source 101 controls a drive power source 51 by a laser light source controller 102, to switch among a pulse waveform among first to third pulse waveforms according to a PE value of the laser light L. In the case of a low PE value, a first pulse waveform formed such that a peak value is located on its first half side and into a saw-blade shape is set as the pulse waveform, and in the case of a high PE value, a second pulse waveform formed such that a peak value is located on its latter half side and into a saw-blade shape is set as the pulse waveform.
Public/Granted literature
- US20130068739A1 LASER PROCESSING METHOD Public/Granted day:2013-03-21
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