Invention Grant
US09406472B2 Planar cavity MEMS and related structures, methods of manufacture and design structures
有权
平面腔MEMS及相关结构，制造方法和设计结构
- Patent Title: Planar cavity MEMS and related structures, methods of manufacture and design structures
- Patent Title (中): 平面腔MEMS及相关结构，制造方法和设计结构
-
Application No.: US12974854Application Date: 2010-12-21
-
Publication No.: US09406472B2Publication Date: 2016-08-02
- Inventor: Dinh Dang , Thai Doan , George A. Dunbar, III , Zhong-Xiang He , Russell T. Herrin , Christopher V. Jahnes , Jeffrey C. Maling , William J. Murphy , Anthony K. Stamper , John G. Twombly , Eric J. White
- Applicant: Dinh Dang , Thai Doan , George A. Dunbar, III , Zhong-Xiang He , Russell T. Herrin , Christopher V. Jahnes , Jeffrey C. Maling , William J. Murphy , Anthony K. Stamper , John G. Twombly , Eric J. White
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01H59/00 ; H01L21/768 ; H01L41/113 ; H01H57/00 ; B81B3/00 ; G06F17/50 ; H01H1/00
Abstract:
Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity having a planar surface using a reverse damascene process.
Public/Granted literature
- US20110315527A1 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES Public/Granted day:2011-12-29
Information query
