A method of manufacturing a stacked thin film piezoelectric filter includes the steps of forming a lower thin film piezoelectric resonator on a substrate, measuring and adjusting a frequency of the lower thin film piezoelectric resonator, forming an acoustic coupling layer on the lower thin film piezoelectric resonator where the frequency of the lower thin film piezoelectric resonator has been adjusted, forming an upper thin film piezoelectric resonator on the acoustic coupling layer, and measuring and adjusting a frequency of the stacked thin film piezoelectric filter.