Invention Grant
US09385312B2 Electronic device and method for fabricating the same 有权
电子器件及其制造方法

  • Patent Title: Electronic device and method for fabricating the same
  • Patent Title (中): 电子器件及其制造方法
  • Application No.: US14276837
    Application Date: 2014-05-13
  • Publication No.: US09385312B2
    Publication Date: 2016-07-05
  • Inventor: Jae-Yeon Lee
  • Applicant: SK HYNIX INC.
  • Applicant Address: KR Icheon
  • Assignee: SK HYNIX INC.
  • Current Assignee: SK HYNIX INC.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2013-0147559 20131129
  • Main IPC: H01L45/00
  • IPC: H01L45/00 H01L27/24 G06F3/06
Electronic device and method for fabricating the same
Abstract:
An electronic device includes a semiconductor memory. The semiconductor memory includes a plurality of first planes and a plurality of second planes which are disposed over a substrate and alternately stacked in a vertical direction over the substrate, where each of the first planes includes a plurality of first lines which extends in a first direction parallel to the substrate and each of the second planes includes a plurality of second lines which extends in a second direction parallel to the substrate and intersecting with the first direction, a plurality of variable resistance patterns which is interposed between each of the first planes and each of the second planes, each of the variable resistance patterns being disposed at a cross point between a first line and a corresponding second lines, and an air-gap which is disposed between neighboring variable resistance patterns.
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