Invention Grant
- Patent Title: Transistor using oxide semiconductor
- Patent Title (中): 晶体管使用氧化物半导体
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Application No.: US13537365Application Date: 2012-06-29
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Publication No.: US09385238B2Publication Date: 2016-07-05
- Inventor: Shunpei Yamazaki
- Applicant: Shunpei Yamazaki
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2011-152164 20110708
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
Stable electrical characteristics and high reliability are provided for a semiconductor device including an oxide semiconductor. In a transistor including an oxide semiconductor layer, a buffer layer containing a constituent similar to that of the oxide semiconductor layer is provided in contact with a top surface and a bottom surface of the oxide semiconductor layer. Such a transistor and a semiconductor device including the transistor are provided. As the buffer layer in contact with the oxide semiconductor layer, a film containing an oxide of one or more elements selected from aluminum, gallium, zirconium, hafnium, and a rare earth element can be used.
Public/Granted literature
- US20130009148A1 SEMICONDUCTOR DEVICE Public/Granted day:2013-01-10
Information query
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