Invention Grant
US09385161B2 Semiconductor integrated circuit device having reservoir capacitor and method of manufacturing the same 有权
具有储存电容器的半导体集成电路装置及其制造方法

Semiconductor integrated circuit device having reservoir capacitor and method of manufacturing the same
Abstract:
A semiconductor integrated circuit device having a reservoir capacitor and a method of manufacturing the same are provided. A first insulating layer is formed on a semiconductor substrate including a first region and a second region. A first conductive layer is formed on the first insulating layer, and a second insulating layer is formed on the first conductive layer. The second insulating layer is patterned to be left in a portion of the first region. A second conductive layer is formed on the second insulating layer and the first conductive layer. The second conductive layer is etched to expose a partial surface of the first conductive layer in the first region. The second conductive layer and the first conductive layer are etched to form a reservoir capacitor in the first region and form a gate in the second region.
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