Invention Grant
- Patent Title: Wrap-around fin for contacting a capacitor strap of a DRAM
- Patent Title (中): 用于接触DRAM电容带的绕包片
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Application No.: US13484739Application Date: 2012-05-31
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Publication No.: US09385131B2Publication Date: 2016-07-05
- Inventor: Felix Beaudoin , Stephen M. Lucarini , Xinhui Wang , Xinlin Wang
- Applicant: Felix Beaudoin , Stephen M. Lucarini , Xinhui Wang , Xinlin Wang
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L27/12 ; H01L21/8242

Abstract:
A conductive strap structure in lateral contact with a top semiconductor layer is formed on an inner electrode of a deep trench capacitor. A cavity overlying the conductive strap structure is filled a dielectric material to form a dielectric capacitor cap having a top surface that is coplanar with a topmost surface of an upper pad layer. A semiconductor mandrel in lateral contact with the dielectric capacitor cap is formed. The combination of the dielectric capacitor cap and the semiconductor mandrel is employed as a protruding structure around which a fin-defining spacer is formed. The semiconductor mandrel is removed, and the fin-defining spacer is employed as an etch mask in an etch process that etches a lower pad layer and the top semiconductor layer to form a semiconductor fin that laterally wraps around the conductive strap structure. An access finFET is formed employing two parallel portions of the semiconductor fin.
Public/Granted literature
- US20130320423A1 WRAP-AROUND FIN FOR CONTACTING A CAPACITOR STRAP OF A DRAM Public/Granted day:2013-12-05
Information query
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