Invention Grant
- Patent Title: Overhead substrate handling and storage system
- Patent Title (中): 架空基板处理和存储系统
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Application No.: US13529264Application Date: 2012-06-21
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Publication No.: US09385019B2Publication Date: 2016-07-05
- Inventor: William J. Fosnight , Eric Christensen , Leslie Marshall , Ryan John Gallagher , Stephanie Waite , Gabriel Gaxiola
- Applicant: William J. Fosnight , Eric Christensen , Leslie Marshall , Ryan John Gallagher , Stephanie Waite , Gabriel Gaxiola
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G1/06 ; B65G1/04

Abstract:
A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window.
Public/Granted literature
- US20130343844A1 OVERHEAD SUBSTRATE HANDLING AND STORAGE SYSTEM Public/Granted day:2013-12-26
Information query
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