Invention Grant
US09385019B2 Overhead substrate handling and storage system 有权
架空基板处理和存储系统

Overhead substrate handling and storage system
Abstract:
A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window.
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