Invention Grant
US09383406B2 Systems and methods for conforming device testers to integrated circuit device with pressure relief valve
有权
用于使装置测试仪与具有减压阀的集成电路装置一致的系统和方法
- Patent Title: Systems and methods for conforming device testers to integrated circuit device with pressure relief valve
- Patent Title (中): 用于使装置测试仪与具有减压阀的集成电路装置一致的系统和方法
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Application No.: US14525223Application Date: 2014-10-28
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Publication No.: US09383406B2Publication Date: 2016-07-05
- Inventor: Nasser Barabi , Chee Wah Ho , Joven R. Tienzo , Oksana Kryachek , Elena V. Nazarov
- Applicant: ESSAI, INC.
- Applicant Address: US CA Fremont
- Assignee: Essai, Inc.
- Current Assignee: Essai, Inc.
- Current Assignee Address: US CA Fremont
- Agent Kang S. Lim
- Main IPC: G01R19/32
- IPC: G01R19/32 ; G01R31/28 ; G01R1/04
Abstract:
The present invention relates to systems and methods for preventing over pressurization in a fluid management system used in an integrated circuit (IC) device tester. The prevention of the over pressurization in the fluid management system is based on the use of a pressure relief valve coupled to the fluid management system.
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