Invention Grant
- Patent Title: Automated atomic force microscope and the operation thereof
- Patent Title (中): 自动原子力显微镜及其操作
-
Application No.: US14692270Application Date: 2015-04-21
-
Publication No.: US09383388B2Publication Date: 2016-07-05
- Inventor: Roger Proksch , Roger C. Callahan , Frank Stetter , Ted Limpoco , Sophia Hohlbach , Jason Bemis , Jason Cleveland
- Applicant: Oxford Instruments Asylum Research, Inc.
- Applicant Address: US CA Goleta
- Assignee: Oxford Instruments Asylum Research, Inc
- Current Assignee: Oxford Instruments Asylum Research, Inc
- Current Assignee Address: US CA Goleta
- Agency: Law Office of Scott C Harris, Inc
- Main IPC: G01Q60/24
- IPC: G01Q60/24 ; G01Q70/08 ; G01Q40/00 ; G01Q60/32 ; G01Q10/06

Abstract:
Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
Public/Granted literature
- US20150301080A1 Automated Atomic Force Microscope and the Operation Thereof Public/Granted day:2015-10-22
Information query