Invention Grant
- Patent Title: Single crystal silicon pulling silica container and manufacturing method thereof
- Patent Title (中): 单晶硅拉硅胶容器及其制造方法
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Application No.: US14004085Application Date: 2012-10-02
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Publication No.: US09382640B2Publication Date: 2016-07-05
- Inventor: Shigeru Yamagata
- Applicant: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
- Current Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2011-271565 20111212
- International Application: PCT/JP2012/006291 WO 20121002
- International Announcement: WO2013/088617 WO 20130620
- Main IPC: C30B15/10
- IPC: C30B15/10 ; C03C3/06 ; C03B19/09 ; C03C17/00 ; C03C17/02 ; C30B15/02 ; C30B29/06

Abstract:
The present invention provides a single-crystal silicon pulling silica container including an outer layer made of opaque silica glass containing gaseous bubbles and an inner layer made of transparent silica glass that does not substantially contain the gaseous bubbles; the container also including: a bottom portion, a curved portion, and a straight body portion, wherein continuous grooves are formed on a surface of the inner layer from at least part of the bottom portion to at least part of the straight body portion through the curved portion. As a result, there are provided the single-crystal silicon pulling silica container that can reduce defects called voids or pinholes in the pulled single-crystal silicon and a method for manufacturing such a silica container.
Public/Granted literature
- US20140053772A1 SINGLE-CRYSTAL SILICON PULLING SILICA CONTAINER AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-02-27
Information query
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