Invention Grant
US09382640B2 Single crystal silicon pulling silica container and manufacturing method thereof 有权
单晶硅拉硅胶容器及其制造方法

Single crystal silicon pulling silica container and manufacturing method thereof
Abstract:
The present invention provides a single-crystal silicon pulling silica container including an outer layer made of opaque silica glass containing gaseous bubbles and an inner layer made of transparent silica glass that does not substantially contain the gaseous bubbles; the container also including: a bottom portion, a curved portion, and a straight body portion, wherein continuous grooves are formed on a surface of the inner layer from at least part of the bottom portion to at least part of the straight body portion through the curved portion. As a result, there are provided the single-crystal silicon pulling silica container that can reduce defects called voids or pinholes in the pulled single-crystal silicon and a method for manufacturing such a silica container.
Information query
Patent Agency Ranking
0/0