Invention Grant
- Patent Title: Polishing pad and manufacturing method therefor
- Patent Title (中): 抛光垫及其制造方法
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Application No.: US14112009Application Date: 2012-04-16
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Publication No.: US09381612B2Publication Date: 2016-07-05
- Inventor: Kouki Itoyama , Fumio Miyazawa
- Applicant: Kouki Itoyama , Fumio Miyazawa
- Applicant Address: JP Tokyo
- Assignee: FUJIBO HOLDINGS, INC.
- Current Assignee: FUJIBO HOLDINGS, INC.
- Current Assignee Address: JP Tokyo
- Agency: Buchanan, Ingersoll & Rooney PC
- Priority: JP2011-091284 20110415
- International Application: PCT/JP2012/060274 WO 20120416
- International Announcement: WO2012/141328 WO 20121018
- Main IPC: C08G18/10
- IPC: C08G18/10 ; B24B37/24 ; C08J9/12 ; C08G18/48 ; C08G18/08 ; C08G101/00

Abstract:
Provided are a polishing pad which remedies the problem of scratches occurring when a conventional hard (dry) polishing pad is used, which is excellent in polishing rate and polishing uniformity, and which can be used for not only primary polishing but also finish polishing, and a manufacturing method therefor. The polishing pad is a polishing pad for polishing a semiconductor device, comprising a polishing layer having a polyurethane-polyurea resin foam containing substantially spherical cells, wherein the polyurethane-polyurea resin foam has a hard segment content (HSC) in a range from 26 to 34%, and has a density D in a range from 0.30 to 0.60 g/cm3, the hard segment content (HSC) being determined by the following formula (1): HSC=100×(r−1)×(Mdi+Mda)÷(Mg+r×Mdi+(r−1)×Mda) (1).
Public/Granted literature
- US20140033615A1 POLISHING PAD AND MANUFACTURING METHOD THEREFOR Public/Granted day:2014-02-06
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