Invention Grant
US09362496B2 Resistive memory cell with trench-shaped bottom electrode 有权
具有沟槽底部电极的电阻式存储单元

Resistive memory cell with trench-shaped bottom electrode
Abstract:
A resistive memory cell, e.g., CBRAM or ReRAM cell, may include a top electrode an a trench-shaped bottom electrode structure defining a bottom electrode connection and a sidewall extending from a first sidewall region adjacent the bottom electrode connection to a tip region defining a tip surface facing generally away from the bottom electrode connection, and wherein the tip surface facing away from the bottom electrode connection has a tip thickness that is less than a thickness of the first sidewall region adjacent the bottom electrode connection. An electrolyte switching region is arranged between the top electrode and the bottom electrode sidewall tip region to provide a path for the formation of a conductive filament or vacancy chain from the bottom electrode sidewall tip surface of the top electrode, via the electrolyte switching region, when a voltage bias is applied to the resistive memory cell.
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