Invention Grant
US09362493B2 Phase-change storage unit for replacing DRAM and FLASH and manufacturing method thereof
有权
用于替换DRAM和闪存的相变存储单元及其制造方法
- Patent Title: Phase-change storage unit for replacing DRAM and FLASH and manufacturing method thereof
- Patent Title (中): 用于替换DRAM和闪存的相变存储单元及其制造方法
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Application No.: US14129955Application Date: 2012-12-26
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Publication No.: US09362493B2Publication Date: 2016-06-07
- Inventor: Feng Rao , Kun Ren , Zhitang Song , Yuefeng Gong , Wanchun Ren
- Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Current Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Shanghai
- Agency: Global IP Services
- Agent Tianhua Gu
- Priority: CN201210339752 20120913
- International Application: PCT/CN2012/087578 WO 20121226
- International Announcement: WO2014/040356 WO 20140320
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
The present invention provides a phase-change storage unit for replacing DRAM and FLASH and a manufacturing method thereof, and the phase-change storage unit includes a phase-change material layer and a cylindrical lower electrode being in contact with and located below the phase-change material layer, where the phase-change material layer is formed by connecting a side wall layer and a round bottom layer, forms a hollow cylinder or hollow inverted conical frustum having an opening at an upper part, and the hollow cylinder or hollow inverted conical frustum is internally filled with a medium layer. The present invention adopts the means of preparing a phase-change material layer with a vertical side wall layer and a phase-change material layer with a slant side wall layer, in which a medium material is filled, and adopts the means of a small electrode, so as to reduce the thickness of the phase-change material layer, thereby reducing the phase-change region during the operation, improving the heat stability and the phase-change speed of the phase-change material layer, and finally achieving purposes of reducing the operating power consumption, improving the device data holding capability, increasing the operating speed of the device, and increasing the number of times of cyclic operating of the device.
Public/Granted literature
- US20150188041A1 Phase-Change Storage Unit For Replacing DRAM And FLASH And Manufacturing Method Thereof Public/Granted day:2015-07-02
Information query
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