Invention Grant
- Patent Title: Method of producing electromechanical transducer element, electromechanical transducer element, liquid droplet discharge head, and image forming apparatus
- Patent Title (中): 制造机电换能器元件，机电换能器元件，液滴喷射头和成像装置的方法
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Application No.: US14572930Application Date: 2014-12-17
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Publication No.: US09362478B2Publication Date: 2016-06-07
- Inventor: Toshiaki Masuda , Keishi Miwa , Keisuke Hayashi , Takahiko Kuroda
- Applicant: Toshiaki Masuda , Keishi Miwa , Keisuke Hayashi , Takahiko Kuroda
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P
- Priority: JP2013-260344 20131217
- Main IPC: B41J2/015
- IPC: B41J2/015 ; B41J2/045 ; B21D53/76 ; B23P17/00 ; H01L41/22 ; H04R17/00 ; H01L41/053 ; H01L41/23 ; H01L41/08 ; H01L41/09
Abstract:
A method of producing an electromechanical transducer element includes forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode.
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