Invention Grant
- Patent Title: Piezoelectric devices and methods for their preparation and use
- Patent Title (中): 压电器件及其制备和使用方法
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Application No.: US13583742Application Date: 2011-12-20
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Publication No.: US09362378B2Publication Date: 2016-06-07
- Inventor: Maneesh Chandran , M. S. Ramachandra Rao
- Applicant: Maneesh Chandran , M. S. Ramachandra Rao
- Applicant Address: IN Chennai
- Assignee: Indian Institute of Technology Madras
- Current Assignee: Indian Institute of Technology Madras
- Current Assignee Address: IN Chennai
- Agency: Pepper Hamilton LLP
- Priority: IN3693/CHE/2011 20111028
- International Application: PCT/IB2011/003086 WO 20111220
- International Announcement: WO2013/061108 WO 20130502
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L29/66 ; H01L41/08 ; H01L41/319 ; H01L21/36 ; H01L29/16 ; H01L29/84 ; H01L41/316 ; H01L21/02 ; H03H9/02 ; H01L41/187
Abstract:
Methods for fabricating a piezoelectric device are provided. The methods can include providing a substrate and forming a nanocrystalline diamond layer on a first surface of the substrate. The methods can also include depositing a piezoelectric layer on a first surface of the nanocrystalline diamond layer.
Public/Granted literature
- US20130153924A1 PIEZOELECTRIC DEVICES AND METHODS FOR THEIR PREPARATION AND USE Public/Granted day:2013-06-20
Information query
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