Invention Grant
- Patent Title: Method for producing a controllable semiconductor component having a plurality of trenches
- Patent Title (中): 用于制造具有多个沟槽的可控半导体部件的方法
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Application No.: US14712178Application Date: 2015-05-14
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Publication No.: US09362371B2Publication Date: 2016-06-07
- Inventor: Andreas Meiser , Markus Zundel
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/74 ; H01L21/768 ; H01L29/40 ; H01L29/49 ; H01L23/48 ; H01L29/423 ; H01L29/78 ; H01L29/51

Abstract:
A method of producing a controllable semiconductor component includes providing a semiconductor body with a top side and a bottom side, and forming a first trench protruding from the top side into the semiconductor body and a second trench protruding from the top side into the semiconductor body. The first trench has a first width and a first depth, and the second trench has a second width greater than the first width and a second depth greater than the first depth. The method further includes forming, in a common process, an oxide layer in the first trench and in the second trench such that the oxide layer fills the first trench and electrically insulates a surface of the second trench, and removing the oxide layer from the first trench completely or at least partly such that the semiconductor body comprises an exposed first surface area arranged in the first trench.
Public/Granted literature
- US20150311294A1 Method for Producing a Controllable Semiconductor Component Having a Plurality of Trenches Public/Granted day:2015-10-29
Information query
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