Invention Grant
- Patent Title: Thin film transistor and display device
- Patent Title (中): 薄膜晶体管和显示装置
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Application No.: US14387496Application Date: 2013-05-08
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Publication No.: US09362313B2Publication Date: 2016-06-07
- Inventor: Shinya Morita , Aya Miki , Hiroaki Tao , Toshihiro Kugimiya
- Applicant: Kobe Steel, Ltd.
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-107813 20120509
- International Application: PCT/JP2013/062978 WO 20130508
- International Announcement: WO2013/168748 WO 20131114
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L27/12 ; H01L29/786

Abstract:
Provided is an oxide-semiconductor-based thin film transistor having satisfactory switching characteristics and stress resistance. Change in threshold voltage through stress application is suppressed in the thin film transistor. The thin film transistor of excellent stability comprises a substrate and, formed thereon, at least a gate electrode, a gate insulating film, oxide semiconductor layers, a source-drain electrode, and a passivation film for protecting the gate insulating film, and oxide semiconductor layers, wherein the oxide semiconductor layers are laminated layers comprising a second oxide semiconductor layer consisting of In, Zn, Sn, and O and a first oxide semiconductor layer consisting of In, Ga, Zn, and O. The second oxide semiconductor layer is formed on the gate insulating film. The first oxide semiconductor layer is interposed between the second oxide semiconductor layer and the passivation film.
Public/Granted literature
- US20150091000A1 THIN FILM TRANSISTOR AND DISPLAY DEVICE Public/Granted day:2015-04-02
Information query
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