Invention Grant
US09362299B2 Method of fabricating a nonvolatile memory device with a vertical semiconductor pattern between vertical source lines 有权
在垂直源极线之间制造具有垂直半导体图案的非易失性存储器件的方法

  • Patent Title: Method of fabricating a nonvolatile memory device with a vertical semiconductor pattern between vertical source lines
  • Patent Title (中): 在垂直源极线之间制造具有垂直半导体图案的非易失性存储器件的方法
  • Application No.: US14703560
    Application Date: 2015-05-04
  • Publication No.: US09362299B2
    Publication Date: 2016-06-07
  • Inventor: Eun-Seok ChoiHyun-Seung Yoo
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Gyeonggi-do
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: IP & T Group LLP
  • Priority: KR10-2011-0116213 20111109
  • Main IPC: H01L27/115
  • IPC: H01L27/115
Method of fabricating a nonvolatile memory device with a vertical semiconductor pattern between vertical source lines
Abstract:
A non-volatile memory device in accordance with one embodiment of the present invention includes a substrate including a P-type impurity-doped region, a channel structure comprising a plurality of interlayer insulating layers that are alternately stacked with a plurality of channel layers on the substrate, a P-type semiconductor pattern that contacts sidewalls of the plurality of channel layers, wherein a lower end of the P-type semiconductor pattern contacts the P-type impurity-doped region, and source lines that are disposed at both sides of the P-type semiconductor pattern and contact the sidewalls of the plurality of channel layers.
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