Invention Grant
US09361915B1 Method for making a disk drive head suspension component having a microstructured surface region
有权
制造具有微结构化表面区域的磁盘驱动器头部悬挂部件的方法
- Patent Title: Method for making a disk drive head suspension component having a microstructured surface region
- Patent Title (中): 制造具有微结构化表面区域的磁盘驱动器头部悬挂部件的方法
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Application No.: US13690883Application Date: 2012-11-30
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Publication No.: US09361915B1Publication Date: 2016-06-07
- Inventor: Kyle T. Tobias , Lawrence E. LaLonde , Darrell C. Sydlo
- Applicant: Hutchinson Technology Incorporated
- Applicant Address: US MN Hutchinson
- Assignee: Hutchinson Technology Incorporated
- Current Assignee: Hutchinson Technology Incorporated
- Current Assignee Address: US MN Hutchinson
- Agency: Faegre Baker Daniels, LLP
- Main IPC: G11B5/127
- IPC: G11B5/127 ; H04R31/00 ; G11B5/48 ; G03F7/20 ; G11B5/84
Abstract:
A method for making a disk drive head suspension component having a microstructured surface region includes depositing a layer of photoimageable polymer having an associated set of process parameters including a minimum resolution and exposing the photoimageable polymer through a photomask having a microstructure-producing region with features below the minimum resolution for the photoimageable polymer. The exposed photoimageable polymer is developed to produce a layer of polymer having a thickness and a microstructured surface region with depressions that are less than the thickness of the polymer.
Information query
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