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US09361820B2 Apparatus and method for inspecting short circuit defects 有权
用于检查短路缺陷的装置和方法

Apparatus and method for inspecting short circuit defects
Abstract:
A method of inspecting a short circuit defect between first wires extending in a first direction and a second direction intersecting the first direction and second wires extending in the first or second direction, the method including inspecting a short circuit defect between the first and second wires by using a potential difference monitored only in the second wires.
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