Invention Grant
- Patent Title: Method of manufacturing a projection objective and projection objective
- Patent Title (中): 制造投影物镜和投影物镜的方法
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Application No.: US13364565Application Date: 2012-02-02
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Publication No.: US09360775B2Publication Date: 2016-06-07
- Inventor: Heiko Feldmann , Toralf Gruner , Alexander Epple
- Applicant: Heiko Feldmann , Toralf Gruner , Alexander Epple
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Priority: EP06024789 20061130
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
The disclosure relates to a method of manufacturing a projection objective, and a projection objective, such as a projection objective configured to be used in a microlithographic process. The method can include defining an initial design for the projection objective and optimizing the design using a merit function. The method can be used in the manufacturing of projection objectives which may be used in a microlithographic process of manufacturing miniaturized devices.
Public/Granted literature
- US20120134016A1 METHOD OF MANUFACTURING A PROJECTION OBJECTIVE AND PROJECTION OBJECTIVE Public/Granted day:2012-05-31
Information query
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