Invention Grant
- Patent Title: Micromechanical component and method for producing a micromechanical component
- Patent Title (中): 微机械部件及其制造方法
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Application No.: US14471582Application Date: 2014-08-28
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Publication No.: US09360664B2Publication Date: 2016-06-07
- Inventor: Simon Armbruster , Helmut Grutzeck , Frank Schatz , Joerg Muchow , Frederic Njikam Njimonzie , Johannes Baader , Kerrin Doessel , Rainer Straub
- Applicant: Simon Armbruster , Helmut Grutzeck , Frank Schatz , Joerg Muchow , Frederic Njikam Njimonzie , Johannes Baader , Kerrin Doessel , Rainer Straub
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Priority: DE102013217111 20130828
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10
Abstract:
A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.
Public/Granted literature
- US20150062677A1 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT Public/Granted day:2015-03-05
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