Invention Grant
US09332651B2 Process for producing structure with metal film, mother die for use in the process, and structure produced by the process
有权
用金属膜制造结构的方法,用于该方法的母模,以及由该方法生产的结构
- Patent Title: Process for producing structure with metal film, mother die for use in the process, and structure produced by the process
- Patent Title (中): 用金属膜制造结构的方法,用于该方法的母模,以及由该方法生产的结构
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Application No.: US12675537Application Date: 2009-02-09
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Publication No.: US09332651B2Publication Date: 2016-05-03
- Inventor: Jun Taniguchi
- Applicant: Jun Taniguchi
- Applicant Address: JP Tokyo
- Assignee: TOKYO UNIVERSITY OF SCIENCE FOUNDATION
- Current Assignee: TOKYO UNIVERSITY OF SCIENCE FOUNDATION
- Current Assignee Address: JP Tokyo
- Agency: Marshall, Gerstein & Borun LLP
- Priority: JP2008-029631 20080208; JP2008-233873 20080911
- International Application: PCT/JP2009/052183 WO 20090209
- International Announcement: WO2009/099235 WO 20090813
- Main IPC: H05K3/00
- IPC: H05K3/00 ; H05K3/20 ; C23C4/18 ; C23C14/00 ; C23C14/02 ; C23C14/16 ; C23C26/00

Abstract:
The invention provides is a process for producing a structure (22) with a metal film, including the steps of preparing a mother die (10) in which a first metal film (16) is formed on the surface of a base (12) on which a concave and convex pattern (14) is formed, forming a second metal film (18) on the first metal film (16), adhering a support member (20) to the second metal film (18), and separating the second metal film (18) to which the concave and convex pattern has been transferred to the second metal film (18) together with the support member from the first metal film (16). Preferably, the first metal film (16) is a film containing Cr and Al, and the second metal film (18) is a film containing at least one metal selected from the group consisting of Au, Ag, Cu, Al, and Pt.
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