Invention Grant
- Patent Title: Detection apparatus having interlayer insulating layer composed of organic material and covering layer composed of inorganic material, detection system, and method for producing detection apparatus
- Patent Title (中): 具有由有机材料构成的层间绝缘层和由无机材料构成的覆盖层的检测装置，检测系统和检测装置的制造方法
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Application No.: US14041070Application Date: 2013-09-30
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Publication No.: US09331119B2Publication Date: 2016-05-03
- Inventor: Kentaro Fujiyoshi , Minoru Watanabe , Keigo Yokoyama , Masato Ofuji , Jun Kawanabe , Hiroshi Wayama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc., IP Division
- Priority: JP2012-220385 20121002
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/146
Abstract:
A detection apparatus includes a plurality of conversion elements, an interlayer insulating layer, and a covering layer. Each of the plurality of conversion elements includes an electrode electrically connected to a corresponding one of a plurality of switching elements and a semiconductor layer disposed on the electrode. The interlayer insulating layer is disposed so as to cover the plurality of switching elements and composed of an organic material, and has a surface including a first region and a second region located outside the first region. The electrodes are disposed on the surface of the interlayer insulating layer in the first region. The covering layer is disposed on the surface of the interlayer insulating layer in the second region and composed of an inorganic material.
Public/Granted literature
- US20140091203A1 DETECTION APPARATUS, DETECTION SYSTEM, AND METHOD FOR PRODUCING DETECTION APPARATUS Public/Granted day:2014-04-03
Information query
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