Invention Grant
- Patent Title: Device for amplifying a laser beam
- Patent Title (中): 用于放大激光束的装置
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Application No.: US13804266Application Date: 2013-03-14
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Publication No.: US09306367B2Publication Date: 2016-04-05
- Inventor: Joachim Schulz , Oliver Mueller
- Applicant: Trumpf Lasersystems for Semiconductor Manufacturing GmbH
- Applicant Address: DE Ditzingen
- Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Current Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Current Assignee Address: DE Ditzingen
- Agency: Fish & Richardson P.C.
- Priority: DE102012205308 20120330
- Main IPC: H01S3/07
- IPC: H01S3/07 ; H01S3/10 ; H01S3/034 ; H01S3/223

Abstract:
A device for amplifying a laser beam is provided. The device includes at least one amplifier chamber in which a laser-active material is provided, at least one transmitting optical member delimiting the amplifier chamber and being arranged at a tilt angle, α, with respect to a plane oriented perpendicularly with respect to an optical axis of the laser beam, and at least one detection unit. The laser beam is reflected by the transmitting optical member into a back reflected laser beam, and the detection unit is arranged such that it detects the back reflected laser beam.
Public/Granted literature
- US20130272327A1 Device for Amplifying a Laser Beam Public/Granted day:2013-10-17
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