Invention Grant
- Patent Title: Semiconductor arrangement and formation thereof
- Patent Title (中): 半导体装置及其形成
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Application No.: US14249407Application Date: 2014-04-10
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Publication No.: US09305837B2Publication Date: 2016-04-05
- Inventor: Chia-Tien Wu , Tien-Lu Lin , Shau-Lin Shue
- Applicant: Taiway Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/768 ; H01L23/528 ; H01L23/532

Abstract:
A semiconductor arrangement and method of formation are provided. The semiconductor arrangement includes a first metal trace having a first metal trace width between about 30 nm to about 60 nm and a first metal trace length. A second metal trace has a second metal trace width between about 10 nm to about 20 nm and a second metal trace length, the first metal trace length different than the second metal trace length. A dielectric layer is between the first metal trace and the second metal trace. The dielectric layer has a dielectric layer width between the first metal trace and the second metal trace between about 10 nm to about 20 nm. The semiconductor arrangement is formed in a manner that allows metal traces having small dimensions to be formed where the metal traces have different dimensions from one another.
Public/Granted literature
- US20150294905A1 SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF Public/Granted day:2015-10-15
Information query
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