Invention Grant
US09281438B2 Process for producing group III element nitride crystal and apparatus for producing group III element nitride crystal 有权
III族元素氮化物晶体的制造方法和III族元素氮化物晶体的制造装置

Process for producing group III element nitride crystal and apparatus for producing group III element nitride crystal
Abstract:
A group III element nitride single crystal is grown on a template immersed in a raw material liquid retained in a crucible and containing a group III material and one of an alkali metal and an alkali earth metal. The raw material liquid remaining after the growth of the single crystal is cooled and solidified, and by feeding a hydroxyl group-containing solution into the crucible, the solidified raw material is removed from around the template, and thus the group III element nitride single crystal is taken out from inside the solidified raw material. The template is disposed at a position away from the bottom of the crucible.
Information query
Patent Agency Ranking
0/0