Invention Grant
US09281438B2 Process for producing group III element nitride crystal and apparatus for producing group III element nitride crystal
有权
III族元素氮化物晶体的制造方法和III族元素氮化物晶体的制造装置
- Patent Title: Process for producing group III element nitride crystal and apparatus for producing group III element nitride crystal
- Patent Title (中): III族元素氮化物晶体的制造方法和III族元素氮化物晶体的制造装置
-
Application No.: US12679372Application Date: 2008-09-26
-
Publication No.: US09281438B2Publication Date: 2016-03-08
- Inventor: Takeshi Hatakeyama , Hisashi Minemoto , Kouichi Hiranaka , Osamu Yamada
- Applicant: Takeshi Hatakeyama , Hisashi Minemoto , Kouichi Hiranaka , Osamu Yamada
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2007-252796 20070928
- International Application: PCT/JP2008/002674 WO 20080926
- International Announcement: WO2009/041053 WO 20090402
- Main IPC: C30B19/02
- IPC: C30B19/02 ; H01L33/00 ; C30B9/10 ; C30B29/40 ; H01L21/02

Abstract:
A group III element nitride single crystal is grown on a template immersed in a raw material liquid retained in a crucible and containing a group III material and one of an alkali metal and an alkali earth metal. The raw material liquid remaining after the growth of the single crystal is cooled and solidified, and by feeding a hydroxyl group-containing solution into the crucible, the solidified raw material is removed from around the template, and thus the group III element nitride single crystal is taken out from inside the solidified raw material. The template is disposed at a position away from the bottom of the crucible.
Public/Granted literature
Information query