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US09281340B2 Manufacturing method for photoelectric conversion apparatus and photoelectric conversion apparatus 有权
光电转换装置及光电转换装置的制造方法

Manufacturing method for photoelectric conversion apparatus and photoelectric conversion apparatus
Abstract:
A manufacturing method for a photoelectric conversion apparatus in which a microlens is arranged for multiple electric charge accumulation regions formed on a semiconductor substrate, includes forming a first impurity region of a first conductive type on the semiconductor substrate; and forming a second impurity region of a second conductive type that is opposite the first conductive type in a part of the first impurity region to isolate the first impurity region into multiple regions such that each of the multiple electric charge accumulation regions includes isolated first impurity regions.
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