Invention Grant
US09281328B2 Image sensor that includes a boundary region formed between a logic circuit region and an image-sensing element region and manufacturing method thereof
有权
图像传感器，其包括在逻辑电路区域和图像感测元件区域之间形成的边界区域及其制造方法
- Patent Title: Image sensor that includes a boundary region formed between a logic circuit region and an image-sensing element region and manufacturing method thereof
- Patent Title (中): 图像传感器，其包括在逻辑电路区域和图像感测元件区域之间形成的边界区域及其制造方法
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Application No.: US13737079Application Date: 2013-01-09
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Publication No.: US09281328B2Publication Date: 2016-03-08
- Inventor: Hiroshi Ohno , Osamu Fujii , Masataka Shiratsuchi , Yoshinori Honguh
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-043393 20120229
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01J40/14 ; H01L27/146 ; H04N5/335 ; H04N5/369
Abstract:
According to one embodiment, an image sensor includes an image-sensing element region formed by arranging a plurality of image-sensing elements on a semiconductor substrate and element isolation portions formed to isolate the image-sensing elements, and a logic circuit region formed in a region different from the image-sensing element region on the substrate and including a plurality of gate patterns. Further, dummy element isolation portions are arranged with a constant pitch in the boundary region between the image-sensing element region and the logic circuit region.
Public/Granted literature
- US20130221196A1 IMAGE SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-08-29
Information query
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