Invention Grant
- Patent Title: Bond head for thermal compression die bonding
- Patent Title (中): 粘合头用于热压缩芯片粘接
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Application No.: US13561241Application Date: 2012-07-30
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Publication No.: US09281290B2Publication Date: 2016-03-08
- Inventor: Kin Yik Hung , Pak Kin Leung , Cheuk Wah Tang , Chi Ping Hung , Gary Peter Widdowson
- Applicant: Kin Yik Hung , Pak Kin Leung , Cheuk Wah Tang , Chi Ping Hung , Gary Peter Widdowson
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: B32B37/00
- IPC: B32B37/00 ; H01L23/00 ; B32B38/18

Abstract:
A bond head for thermal compression die bonding comprises a collet operative to support a die on a first side of the collet during die bonding and a bond head heater located on a second side of the collet opposite to the first side for heating the collet and the die. A die vacuum suction hole on the bond head heater applies a vacuum suction force to hold the collet, and a collet vacuum suction hole on the bond head heater applies a vacuum suction force to hold the die. At least one vacuum distribution channel that is formed on the second side of the collet is in fluid communication with the collet vacuum suction hole and distributes the vacuum suction force across a surface of the second side of the collet for securing the collet.
Public/Granted literature
- US20140027068A1 BOND HEAD FOR THERMAL COMPRESSION DIE BONDING Public/Granted day:2014-01-30
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