Invention Grant
- Patent Title: Field effect transistor constructions and memory arrays
- Patent Title (中): 场效应晶体管结构和存储器阵列
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Application No.: US14519021Application Date: 2014-10-20
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Publication No.: US09276134B2Publication Date: 2016-03-01
- Inventor: Kamal M. Karda , Chandra Mouli , Gurtej S. Sandhu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/792 ; H01L29/66 ; H01L27/115 ; H01L29/06 ; H01L29/24 ; H01L21/02

Abstract:
In some embodiments, a transistor includes a stack having a bottom source/drain region, a first insulative material, a conductive gate, a second insulative material, and a top source/drain region. The stack has a vertical sidewall with a bottom portion along the bottom source/drain region, a middle portion along the conductive gate, and a top portion along the top source/drain region. Third insulative material is along the middle portion of the vertical sidewall. A channel region material is along the third insulative material. The channel region material is directly against the top and bottom portions of the vertical sidewall. The channel region material has a thickness within a range of from greater than about 3 Å to less than or equal to about 10 Å; and/or has a thickness of from 1 monolayer to 7 monolayers.
Public/Granted literature
- US20150200308A1 Field Effect Transistor Constructions And Memory Arrays Public/Granted day:2015-07-16
Information query
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