Invention Grant
- Patent Title: Semiconductor device and fabricating method thereof
- Patent Title (中): 半导体器件及其制造方法
-
Application No.: US14161744Application Date: 2014-01-23
-
Publication No.: US09276116B2Publication Date: 2016-03-01
- Inventor: Shigenobu Maeda , Tsukasa Matsuda , Hidenobu Fukutome
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Elecronics Co., Ltd.
- Current Assignee: Samsung Elecronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel & Sibley, P.A.
- Priority: KR10-2013-008118 20130124
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/417 ; H01L29/66

Abstract:
A semiconductor device is provided. The semiconductor device includes a first fin on a substrate, a first gate electrode formed on the substrate to intersect the first fin, a first elevated source/drain on the first fin on both sides of the first gate electrode, and a first metal alloy layer on an upper surface and sidewall of the first elevated source/drain.
Public/Granted literature
- US20140203370A1 Semiconductor Device and Fabricating Method Thereof Public/Granted day:2014-07-24
Information query
IPC分类: