Invention Grant
- Patent Title: Semiconductor device including pixels, microlenses, and a monitoring structure, and a method of manufacturing the same
- Patent Title (中): 包括像素，微透镜和监视结构的半导体器件及其制造方法
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Application No.: US13611375Application Date: 2012-09-12
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Publication No.: US09276028B2Publication Date: 2016-03-01
- Inventor: Mitsuhiro Yomori
- Applicant: Mitsuhiro Yomori
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. I.P. Division
- Priority: JP2011-223300 20111007
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L27/146 ; G02B3/00
Abstract:
A semiconductor device includes a microlens provided in a pixel area and a monitoring structure provided in a peripheral area that is separate from the pixel area. The monitoring structure has a shape correlated with a shape of the microlens. A shape of a section of the monitoring structure in a plane perpendicular to a substrate is constant.
Public/Granted literature
- US20130087874A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-04-11
Information query
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