Invention Grant
- Patent Title: Multi-dopant permeation tube
- Patent Title (中): 多掺杂剂渗透管
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Application No.: US13698507Application Date: 2012-05-22
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Publication No.: US09275842B2Publication Date: 2016-03-01
- Inventor: Timothy B. Burton , Stephen Scott Milt
- Applicant: Timothy B. Burton , Stephen Scott Milt
- Applicant Address: US MA North Andover
- Assignee: DSA DETECTION LLC
- Current Assignee: DSA DETECTION LLC
- Current Assignee Address: US MA North Andover
- Agency: Lando & Anastasi, LLP
- International Application: PCT/US2012/038996 WO 20120522
- International Announcement: WO2012/166439 WO 20121206
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/04 ; G01N27/62

Abstract:
Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.
Public/Granted literature
- US20130140455A1 MULTI-DOPANT PERMEATION TUBE Public/Granted day:2013-06-06
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