Invention Grant
US09275830B2 Scanning charged particle microscope, image acquisition method, and electron detection method 有权
扫描带电粒子显微镜,图像采集方法和电子检测方法

  • Patent Title: Scanning charged particle microscope, image acquisition method, and electron detection method
  • Patent Title (中): 扫描带电粒子显微镜,图像采集方法和电子检测方法
  • Application No.: US14277948
    Application Date: 2014-05-15
  • Publication No.: US09275830B2
    Publication Date: 2016-03-01
  • Inventor: Takeshi Otsuka
  • Applicant: JEOL Ltd.
  • Applicant Address: JP Tokyo
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JP2013-103301 20130515
  • Main IPC: H01J37/22
  • IPC: H01J37/22 H01J37/28 H01J37/244
Scanning charged particle microscope, image acquisition method, and electron detection method
Abstract:
A scanning charged particle microscope is offered which can selectively detect and image electrons. The scanning charged particle microscope (100) has: a source (1) of a charged particle beam (E1); an objective lens (6) for bringing the charged particle beam (E1) emitted from the source (1) into focus at a sample (S); a scanning deflector (4) for scanning the focused charged particle beam (E1) over the sample (S); a sorting portion (10) for sorting out electrons emitted at given emission angles from electrons released from the sample (S) in response to irradiation of the sample (S) by the charged particle beam (E1); an electron deflector (20) for producing a deflecting field to deflect the electrons (E2) sorted out according to their energy; a detection portion (30) for detecting the electrons (E2) deflected by the electron deflector (20); and an image creating portion (44) for creating an image, based on the results of the detection performed by the detection portion (30).
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