Invention Grant
- Patent Title: Image forming device and computer program
- Patent Title (中): 图像形成装置和计算机程序
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Application No.: US13818094Application Date: 2011-08-31
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Publication No.: US09275829B2Publication Date: 2016-03-01
- Inventor: Katsumi Setoguchi , Osamu Komuro
- Applicant: Katsumi Setoguchi , Osamu Komuro
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-193075 20100831
- International Application: PCT/JP2011/069760 WO 20110831
- International Announcement: WO2012/029846 WO 20120308
- Main IPC: H01J3/14
- IPC: H01J3/14 ; G06K9/36 ; H01J37/28 ; H01J37/26

Abstract:
In an image forming apparatus and a computer program, extraction of information about distortion in a charged particle beam scan area can be implemented. An image forming apparatus integrates image data obtained by a charged particle beam apparatus and calculates, from a plurality of images with different scan directions of the charged particle beam apparatus, first information about the amount of change in a feature quantity in accordance with the time of irradiation of the charged particle beam, second information about the amount of change in the feature quantity before and after a change in beam scan direction, and/or third information about a position error of a pattern on the image before and after the change in beam scan direction.
Public/Granted literature
- US20130141563A1 IMAGE FORMING DEVICE AND COMPUTER PROGRAM Public/Granted day:2013-06-06
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