Invention Grant
- Patent Title: Catadioptric projection objective comprising deflection mirrors and projection exposure method
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Application No.: US14522917Application Date: 2014-10-24
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Publication No.: US09274327B2Publication Date: 2016-03-01
- Inventor: Thomas Schicketanz , Toralf Gruner
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102009048553 20090929
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42 ; G02B17/08 ; G02B13/14 ; G03F7/20 ; G03F1/26

Abstract:
A catadioptric projection objective has a multiplicity of lenses and at least one concave mirror, and also two deflection mirrors in order to separate a partial beam path running from the object field to the concave mirror from the partial beam path running from the concave mirror to the image field. The deflection mirrors are tilted relative to the optical axis of the projection objective about tilting axes running parallel to a first direction (x-direction). The first deflection mirror is arranged in optical proximity to a first field plane and the second deflection mirror is arranged in optical proximity to a second field plane, which is optically conjugate with respect to the first field plane. A displacement device for the synchronous displacement of the deflection mirrors is provided. The deflection mirrors have different local distributions of their reflection properties in first and second reflection regions, respectively.
Public/Granted literature
- US20150062725A1 CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND PROJECTION EXPOSURE METHOD Public/Granted day:2015-03-05
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