Invention Grant
- Patent Title: High throughput scanning probe microscopy device
- Patent Title (中): 高通量扫描探针显微镜装置
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Application No.: US14410799Application Date: 2013-06-24
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Publication No.: US09274138B2Publication Date: 2016-03-01
- Inventor: Hamed Sadeghian Marnani , Teunis Cornelis van den Dool , Niek Rijnveld
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL Delft
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL Delft
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: EP12174204 20120628
- International Application: PCT/NL2013/050447 WO 20130624
- International Announcement: WO2014/003547 WO 20140103
- Main IPC: G01Q10/04
- IPC: G01Q10/04 ; B82Y35/00 ; G01Q60/38 ; G01Q70/06

Abstract:
A scanning probe microscopy device for mapping nanostructures on a sample surface of a sample is provided. The device may comprise a plurality probes for scanning the sample surface, and one or more motion actuators for enabling motion of the probes relative to the sample, wherein each of the plurality of probes comprises a probing tip mounted on a cantilever arranged for bringing the probing tip in contact with the sampling surface for enabling the scanning. The device may further comprise a plurality of Z-position detectors for determining a position of each probing tip along a Z-direction when the probing tip is in contact with the sample surface, wherein the Z-direction is a direction transverse to the sample surface, for enabling mapping of the nanostructures.
Public/Granted literature
- US20150185248A1 HIGH THROUGHPUT SCANNING PROBE MICROSCOPY DEVICE Public/Granted day:2015-07-02
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