Invention Grant
- Patent Title: Leakage inspection apparatus and leakage inspection method
- Patent Title (中): 泄漏检查装置和泄漏检查方法
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Application No.: US13808226Application Date: 2011-07-01
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Publication No.: US09274021B2Publication Date: 2016-03-01
- Inventor: Setsuo Yamamoto , Hiroki Kurisu , Naoki Takada , Mitsugu Nakagawa , Katsushi Tsuge , Yukihiro Ishikawa
- Applicant: Setsuo Yamamoto , Hiroki Kurisu , Naoki Takada , Mitsugu Nakagawa , Katsushi Tsuge , Yukihiro Ishikawa
- Applicant Address: JP Yamaguchi-shi JP Obu-shi
- Assignee: YAMAGUCHI UNIVERSITY,MARUNAKA CO., LTD.
- Current Assignee: YAMAGUCHI UNIVERSITY,MARUNAKA CO., LTD.
- Current Assignee Address: JP Yamaguchi-shi JP Obu-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2010-153217 20100705
- International Application: PCT/JP2011/065222 WO 20110701
- International Announcement: WO2012/005199 WO 20120112
- Main IPC: G01M3/20
- IPC: G01M3/20 ; G01M3/22 ; G01M3/32

Abstract:
Provided are a leakage inspection apparatus and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber 21. The leakage inspection apparatus includes liquid supplying and pressurizing means 11 for supplying a probe liquid to the inside of the tested-body chamber 21 and pressurizing the probe liquid to a high pressure 0.1 MPa or more, vacuum evacuation means 22-b, 23-b and a quadrupole mass spectrometer 34. The tested body 21 is evacuated, the probe liquid is supplied to the inside of the tested body and pressurized to 0.1 MPa or more and the concentration of a probe medium leaked from the tested body and evaporated in a vacuum is measured by the quadrupole mass spectrometer 34, thereby measuring the flow rate of leakage from the tested body. This makes it possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously possible to perform a pressure tightness inspection at an atmospheric pressure of 0.1 MPa or more, especially at a high pressure ranging from 1 MPa to 1 GPa.
Public/Granted literature
- US20130199274A1 LEAKAGE INSPECTION APPARATUS AND LEAKAGE INSPECTION METHOD Public/Granted day:2013-08-08
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