Invention Grant
US09253822B2 Phase change material variable capacitor 有权
相变材料可变电容器

Phase change material variable capacitor
Abstract:
A method of manufacturing a variable capacitor includes forming a capacitor conductor. The method also includes forming a phase change material adjacent the capacitor conductor. The method further includes forming a first contact on the capacitor conductor. The method additionally includes forming a second contact and a third contact on the phase change material.
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