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US09252732B2 Acoustic wave device and method for manufacturing the same 有权
声波装置及其制造方法

Acoustic wave device and method for manufacturing the same
Abstract:
An acoustic wave device includes: a piezoelectric substrate; a dielectric layer formed on the piezoelectric substrate; and first and second comb-tooth electrodes formed on the dielectric layer, the dielectric layer having a first thickness between the first comb-tooth electrodes and the piezoelectric substrate and a second thickness between the second comb-tooth electrodes and the piezoelectric substrate, the first and second thicknesses being different from each other.
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