Invention Grant
- Patent Title: Non-volatile semiconductor memory device
- Patent Title (中): 非易失性半导体存储器件
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Application No.: US13743485Application Date: 2013-01-17
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Publication No.: US09252289B2Publication Date: 2016-02-02
- Inventor: Ayako Inoue , Kazuhiro Tsumura
- Applicant: Seiko Instruments Inc.
- Applicant Address: JP
- Assignee: SEIKO INSTRUMENTS INC.
- Current Assignee: SEIKO INSTRUMENTS INC.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2012-012993 20120125
- Main IPC: H01L21/335
- IPC: H01L21/335 ; H01L21/8232 ; H01L29/788 ; H01L49/02 ; G11C16/04

Abstract:
A non-volatile semiconductor memory device has a semiconductor substrate, an element isolation region disposed in a surface of the semiconductor substrate, a well region disposed along one principal surface of the semiconductor substrate, source and drain regions arranged in the well region, a gate oxide film arranged on the surface of the semiconductor substrate between the source region and the drain region, a floating gate disposed on the gate oxide film, and an insulating film disposed on a surface of the floating gate. A control gate is capacitively coupled to the floating gate disposed through intermediation of the insulating film. A resistive element is serially connected to the control gate. Write characteristics of the non-volatile semiconductor memory device are improved as a result of a delay effect of the resistive element serially connected to the control gate.
Public/Granted literature
- US20130187216A1 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2013-07-25
Information query
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