Invention Grant
- Patent Title: Solid state image pickup apparatus and method for manufacturing the same
- Patent Title (中): 固体摄像装置及其制造方法
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Application No.: US14154883Application Date: 2014-01-14
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Publication No.: US09252183B2Publication Date: 2016-02-02
- Inventor: Masaki Kurihara , Daisuke Shimoyama , Masataka Ito , Kyouhei Watanabe
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc. IP Division
- Priority: JP2013-005601 20130116; JP2013-045677 20130307
- Main IPC: H01L27/146
- IPC: H01L27/146
Abstract:
When forming a hollow portion between each color filter, in order to realize the formation of the hollow portions with a narrower width, a plurality of light receiving portions are formed on the upper surface of a semiconductor substrate, a plurality of color filters corresponding to each of the light receiving portions are formed above the semiconductor substrate, a photoresist is formed on each color filter, side walls are formed on the side surfaces of the photoresist, and a hollow portion is formed between each color filter by performing etching using at least the side walls as a mask.
Public/Granted literature
- US20140199803A1 SOLID STATE IMAGE PICKUP APPARATUS AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2014-07-17
Information query
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