Invention Grant
- Patent Title: Semiconductor memory device
- Patent Title (中): 半导体存储器件
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Application No.: US13599153Application Date: 2012-08-30
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Publication No.: US09252097B2Publication Date: 2016-02-02
- Inventor: Yasuyuki Baba
- Applicant: Yasuyuki Baba
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-65789 20120322
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L23/498 ; H01L45/00 ; H01L27/02

Abstract:
The semiconductor memory device comprises a plurality of first wiring lines extending in a first direction, a plurality of second wiring lines extending in a second direction crossing the first direction, and a memory cell array comprising memory cells, the memory cells being connected to the first wiring lines and second wiring lines in the crossing portions of the first and second wiring lines. A plurality of first dummy-wiring-line regions are formed in the peripheral area around the memory cell array. A contact is formed in the peripheral area, the contact extending in a third direction perpendicular to the first and second directions. A plurality of second dummy-wiring-line regions are formed in the periphery of the contact. The mean value of the areas of the second dummy-wiring-line regions is less than the mean value of the areas of the first dummy-wiring-line regions.
Public/Granted literature
- US20130249113A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2013-09-26
Information query
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