Invention Grant
US09252055B2 Wafer dicing press and method and semiconductor wafer dicing system including the same
有权
晶片切割机及其制造方法及半导体晶圆切片系统
- Patent Title: Wafer dicing press and method and semiconductor wafer dicing system including the same
- Patent Title (中): 晶片切割机及其制造方法及半导体晶圆切片系统
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Application No.: US14510246Application Date: 2014-10-09
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Publication No.: US09252055B2Publication Date: 2016-02-02
- Inventor: Won-chul Lim
- Applicant: Won-chul Lim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello LLP
- Priority: KR10-2011-0010308 20110201
- Main IPC: H01L21/78
- IPC: H01L21/78 ; B28D5/00 ; H01L21/67 ; H01L21/00 ; H01L21/683 ; H01L21/673

Abstract:
In a wafer dicing press for reducing time and cost for wafer dicing and for evenly applying a dicing pressure to a whole wafer, a wafer dicing press includes a support unit supporting a first side of a wafer; and a pressurization device applying a pressure, by dispersing the pressure, to a second side of the wafer so that a laser-scribed layer of the wafer operates as a division starting point. Accordingly, the wafer dicing press reduces laser radiation and pressure-application times for dividing a wafer into semiconductor devices. This increased efficiency is achieved without increasing the likelihood of damaging the wafer.
Public/Granted literature
- US20150140783A1 WAFER DICING PRESS AND METHOD AND SEMICONDUCTOR WAFER DICING SYSTEM INCLUDING THE SAME Public/Granted day:2015-05-21
Information query
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